micro-electromechanical systems (mems) meaning in Chinese

微电子机械系统

Another important part of this paper is optimal design of a micro - electromechanical systems ( mems ) phased shifter using genetic algorithms ( gas )
将遗传算法应用于毫米波微电子机械系统( mems )相移器的设计和优化是本论文的一个重要组成部分。
Micro - electromechanical systems ( mems ) are micron - scale sensing and / or actuation devices integrated on a chip . with the development of microelectronic mechanical system , it is found wide application in industries and national defense
随着微电子机械系统( microelectronicmechanicalsystem ， mems )技术的兴起和发展， mems器件已大量应用于国防和民用产品。
In this thesis , we focus on dual axis capacitance vibration transducer , which was fabricated by micro - electromechanical systems ( mems ) . the operation mechanism of this kind of accelerometer was analyzed . under external acceleration , the space between sensitive quality mass and detecting electrode will change , which causes the variation of equivalent capacitance
本论文研究了采用微机械加工技术( mems )制作的双轴电容式振动传感器,其基本工作原理是利用惯性质量块在外界加速度的作用下与检测电极间的空隙发生改变,从而引起等效电容的变化来测定振动加速度的。